Low-voltage Micromachining-Based Scalable Optical Switch

JF Bao,Y Yuan,ZH Cao,X Wu
DOI: https://doi.org/10.1117/12.483176
2002-01-01
Abstract:We report a fiber optic switch based on a novel MEMS technology allowing fast switch (<2 ms), excellent isolation (>50dB) and wide bandwidth. Each switch module consists of an electromagnetically actuated gold-coated silicon mirror rotating around a 100 mum diameter shaft and a miniature 5V driven coil. Enabling technology is precision EDM machining and laser cutting. The switch is scalable to 8 X 8 and allows the realization of high capacity cross-connects.
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