Micromechanical Variable Optical Attenuator Based on EDM Micromachining

ZH Cao,Y Yuan,JF Bao,X Wu
DOI: https://doi.org/10.1117/12.483177
2002-01-01
Abstract:A micro-machined MEMS variable optical attenuator capable of greater than 40 dB dynamic range is described. The device consists of an electromagnetically actuated gold-coated silicon micro-mirror rotating around a 100 mum-diameter shaft and a miniature driven coil. Enabling technology is precision EDM machining and laser cutting. The attenuator is scalable to a discrete array to implement a WDM drop module of an add/drop multiplexer and allows the realization of high capacity cross-connects.
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