A Micro-Machining-based Digital Variable Optical Attenuator

Zh Cao,X Wu
DOI: https://doi.org/10.1016/j.sna.2004.12.016
IF: 4.291
2005-01-01
Sensors and Actuators A Physical
Abstract:A micro-machining-based digital MOEMS variable optical attenuator is described. The device implements an electromagnetically actuated shutter interposed in a fiber collimator gap and is capable of digitally adjusting optical attenuation and latching during power-off. The device is fabricated using non-silicon micro-machining technology. The performance of the digital VOA is measured and compared with calculated results. The device has less than 0.3dB insertion loss, greater than 40dB dynamic range, less than 0.1dB polarization-dependent loss and low wavelength-dependent loss with <0.2dB over the C-band (1535–1565nm).
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