A Micromachining Based Miniature Variable Optical Attenuator

Peng Wan,Ye Yuan,Xingkun Wu
2006-01-01
Abstract:A novel design of micro-machined variable optical attenuator (VOA) with a packaged size as small as 25×10×7 mm 3 is presented. Attenuation was introduced by a rotatable miniature silicon mirror, with its orientation finely adjusted through the balance between a pair of electromagnetic forces. The design is free of conventional spring restoring force for attenuation reset and therefore ensures a high stability. The realizing structure was fabricated by EDM micro-machining as well as laser spot welding. VOA prototypes exhibit a wide attenuation range of 40 dB with an insertion loss of 0. 8 dB and back-reflection of - 50 dB. The measured result was compared with that of an FEA model using ANSYS software package and a good agreement was obtained. The VOA can be arrayed for effective signal balancing and device protection in WDM/DWDM network systems.
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