Micromachining-based fiber-coupled variable optical attenuator

Huiming Yan,Zhonghui Cao,Xingkun Wu
DOI: https://doi.org/10.1117/12.577310
2005-01-01
Abstract:A design of micromachining based direct-coupled variable optical attenuator (VOA) is presented. The device, fabricated by using CNC engraving and laser spot welding techniques, operates by misaligning a fiber-to-fiber coupling through a lateral displacement of one of the fibers Mounted on a micro-machined flexure driven electromagnetically. An FET software package ANSYS was employed to optimize micro-mechanical structure and simulation of the device operation was described in detail. The measured performance of a VOA prototype is reported, featuring a fast dynamic response (< 2.3 ms), great dynamic range (0 similar to 65dB) and wide bandwidth.
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