Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams

Qian Ma,Yinpeng Hu,Ye Lu,Yunzhi Liu,Huan Li,Daoxin Dai

2024-09-11

Abstract:High-performance photonic switches are essential for large-scale optical routing for AI large models and Internet of things. Realizing nonvolatility can further reduce power consumption and expand application scenarios. We propose a nonvolatile 2*2 silicon photonic micro-electromechanical system (MEMS) switch compatible with standard silicon photonic foundry processes. The switch employs electrostatic comb actuator to change the air gap of the compact horizontal adiabatic coupler and achieves nonvolatility with centrally-clamped stepped bistable mechanical beams. The photonic switch features a 10s us-scale switching speed and a 10s fJ-scale simulated switching energy within a 100*100 um2 footprint, with <=12 V driving voltages. This 2*2 switch can be used in a variety of topologies for large-scale photonic switches, and its nonvolatility can potentially support future photonic FPGA designs.

Applied Physics,Optics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to achieve high - performance, low - power - consumption and non - volatile silicon - based photonic micro - electro - mechanical systems (MEMS) switches in large - scale optical routing. Specifically, the paper focuses on designing a 2×2 non - volatile silicon - based photonic MEMS switch that is compatible with the standard silicon - based photonic manufacturing process, thereby reducing energy consumption, expanding application scenarios, and supporting the design of future photonic FPGAs.

### Background and Objectives of the Paper

With the development of artificial intelligence large - scale models and the Internet of Things, the demand for large - scale optical routing is increasing day by day. High - performance photonic/optical switches are more and more widely used in high - performance data centers and computing centers. However, most of the existing photonic/optical switches are volatile, that is, they require a continuous driving voltage to maintain their switching states, which not only increases energy consumption but also limits application scenarios. Therefore, the development of non - volatile photonic switches has become the focus of research.

### Solutions

The paper proposes a 2×2 non - volatile silicon - based photonic MEMS switch based on Centrally - Clamped Stepped Bistable Mechanical Beams (CCS beams). The main features of this switch include:

1. **Non - volatility**: By designing the CCS beams, the switch can maintain its state without applying a driving voltage, thus achieving non - volatility.
2. **Low - power consumption**: The switch consumes almost no electrical energy in the stable state, and only requires driving voltages of 12V and 9V to complete the switching operation.
3. **High - performance**: The switch has a fast switching speed (on the order of 10 μs), low insertion loss (<0.49 dB), high extinction ratio (>20 dB), and exhibits excellent optical performance in the 1520 - 1610 nm band.
4. **Small size**: The size of the switch is only 100×100 μm², which is suitable for large - scale integration.
5. **Compatibility**: The design of the switch is compatible with the standard silicon - based photonic manufacturing process, which is convenient for large - scale production.

### Technical Details

1. **CCS Beam Design**:
- **Structure**: The CCS beam is composed of a flexible cosine - shaped beam and a rigid straight beam. Through optimized design, stronger bistability and higher switching force are achieved.
- **Performance**: The switching force of the CCS beam is stronger than that of the traditional cosine - shaped beam, and the switching energy is lower (65 fJ and 46 fJ).

2. **Electrostatic Comb - Drive**:
- **Principle**: By applying a voltage to generate electrostatic attraction, the comb - teeth are driven to move, thereby changing the air gap of the Horizontal Apodized Coupler (HAC).
- **Performance**: Each comb - tooth pair can generate an electrostatic force of about 6.8 nN at a voltage of 20V, which is sufficient to drive the CCS beam to switch between two stable states.

3. **Horizontal Apodized Coupler (HAC)**:
- **Design**: By optimizing the empirical expression of waveguide width change, a compact 70 μm - long HAC is designed to achieve a high extinction ratio and low insertion loss.
- **Performance**: In the 1520 - 1578 nm band, the simulated extinction ratio of the HAC is greater than 20 dB.

### Experimental Results

The experimental results show that the designed non - volatile silicon - based photonic MEMS switch exhibits excellent optical performance in the C - band, with a minimum crosstalk of - 32.65 dB and an insertion loss of less than 0.49 dB. In addition, the mechanical stability of the switch has also been verified, and it can operate for more than 5×10^7 cycles at a frequency of 20 kHz without significant performance degradation.

### Conclusions

The paper successfully designs and implements a non - volatile 2×2 silicon - based photonic MEMS switch. This switch has the characteristics of low - power consumption, high - performance and small size, and is compatible with the standard silicon - based photonic manufacturing process, providing the possibility for future photonic FPGA design. This research result is expected to be widely used in large - scale optical routing, data centers and the Internet of Things and other fields.