Nonvolatile Silicon MEMS Optical Switch Based on Bistable Mechanical Beams

Qian Ma,Yinpeng Hu,Ye Lu,Yunzhi Liu,Huan Li,Daoxin Dai

DOI: https://doi.org/10.1109/OECC56963.2023.10209727

2023-01-01

Abstract:We have proposed and implemented a $2 \times 2$ nonvolatile silicon MEMS optical switch based on bistable mechanical beams driven by electrostatic comb actuators, which is fully compatible with standard silicon photonics foundry processes.

What problem does this paper attempt to address?

Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams

Qian Ma,Yinpeng Hu,Ye Lu,Yunzhi Liu,Huan Li,Daoxin Dai

2024-09-11

Abstract:High-performance photonic switches are essential for large-scale optical routing for AI large models and Internet of things. Realizing nonvolatility can further reduce power consumption and expand application scenarios. We propose a nonvolatile 2*2 silicon photonic micro-electromechanical system (MEMS) switch compatible with standard silicon photonic foundry processes. The switch employs electrostatic comb actuator to change the air gap of the compact horizontal adiabatic coupler and achieves nonvolatility with centrally-clamped stepped bistable mechanical beams. The photonic switch features a 10s us-scale switching speed and a 10s fJ-scale simulated switching energy within a 100*100 um2 footprint, with <=12 V driving voltages. This 2*2 switch can be used in a variety of topologies for large-scale photonic switches, and its nonvolatility can potentially support future photonic FPGA designs.

Applied Physics,Optics
Low-voltage Micromachining-Based Scalable Optical Switch

JF Bao,Y Yuan,ZH Cao,X Wu

DOI: https://doi.org/10.1117/12.483176

2002-01-01

Abstract:We report a fiber optic switch based on a novel MEMS technology allowing fast switch (<2 ms), excellent isolation (>50dB) and wide bandwidth. Each switch module consists of an electromagnetically actuated gold-coated silicon mirror rotating around a 100 mum diameter shaft and a miniature 5V driven coil. Enabling technology is precision EDM machining and laser cutting. The switch is scalable to 8 X 8 and allows the realization of high capacity cross-connects.
Scalable Nonblocking &Lt;inline-Formula> &Lt;tex-Math Notation="latex">$4\times4$ &Lt;/tex-Math> &Lt;/inline-Formula> Silicon Optical Switch Based on Dual-Microring Resonators

Xiaoqing Guo,Gencheng Wang,Tingge Dai,Bei Chen,Yuehai Wang,Hui Yu,Zhenhui Li,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2019.2896439

IF: 2.6

2019-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate a reconfigurable 4 × 4 silicon optical switch network by using an architecture of Half-Crossbar. It has the advantage of flexible scalability and utilizes fewer elements. The proposed switch is composed of six dual-microring resonators tuned by the thermo-optic effect. The footprint is only 176 μm × 632 μm. At the wavelength of 1557 nm, the average insertion loss is smaller than 2.5 dB according to the results of all 24 switching states. Its rising response time is about 4.9 μs. The experiment verified the optical data transmission ability of the proposed switch network.
Novel MEMS Torsional Mirror Optical Switch

YR Yang,WP Liu,YM Wu,JY Yang,YL Wang

DOI: https://doi.org/10.1117/12.519925

2004-01-01

Abstract:We have reported a novel 1x2 MEMS optical switch for telecommunication application. A vertical mirror was fabricated by wet anisotropic etching in (110)-oriented silicon wafer. Using DRIE (Deep Reactive Ion Etching) technique, we make a torsional actuator to turn a vertical mirror with a small angle. The actuator was composed of a cantilever beam and two electrodes with curved shape edges. The mirror size was 500um (L) x 125um (H) x 50um (W), and the cantilever dimension was 3000um (L) x 125um (H) x 10um (W). In the optical switch, ball lenses were added in the optics system to extend working distance of fibers. We also fabricated a micro optical platform integrated with the device to simplify the coupling. On the platform, a U-shape groove and fiber clamps were fabricated to accommodate and fix the SMF (single mode fiber). The surface roughness (Ra) of etched mirror was tested below 10nm. The optical switch was tested on electric and optical characteristics: switching voltage 78.5V, resonance frequency 2.3kHz, insertion loss 4similar to5 dB, crosstalk 45dB. The device can perform the switching function by the large.
Non-volatile Polarization-Insensitive 1×2 Silicon Optical Switch Using Phase-Change Materials

Wei Liang,Weiwei Chen,Pengjun Wang,Shixun Dai,Bohao Zhang,Yaxun Zhou,Jun Li,Yan Li,Qiang Fu,Tingge Dai,Hui Yu,Jianyi Yang

DOI: https://doi.org/10.1016/j.optcom.2020.126407

IF: 2.4

2021-01-01

Optics Communications

Abstract:In this paper, a non-volatile polarization-insensitive 1×2 silicon optical switch utilizing phase-change materials is presented. The presented device is composed of three polarization beam combiners/splitters, two directional couplers with phase change materials, and a polarization-insensitive waveguide crossing. By adjusting the phase state of phase-change material, polarization-insensitive switching behavior is realized. As an example, the proposed switch using Ge2Sb2Te5 is comprehensively optimized and analyzed based on particle swarm optimization algorithm and finite difference time domain method. The designed device can have a crosstalk of less than −15.98 dB and an insertion loss of smaller than 0.95 dB over the C-band in the case of TE polarization, while a maximum crosstalk of −13.53 dB and a maximum insertion loss of 1.37 dB can be obtained within the C-band in the case of TM polarization.
2 × 2 Silicon Photonic MEMS Switch Based on Split Waveguide Crossing

Yinpeng Hu,Yi Sun,Ye Lu,Huan Li,Daoxin Dai

DOI: https://doi.org/10.1109/OECC56963.2023.10209619

2023-01-01

Abstract:We have proposed and implemented a novel 2 × 2 silicon photonic MEMS switch based on a split waveguide crossing, exhibiting experimentally low excess loss of 0.32 dB and high extinction ratio of 51 dB at 1550 nm.
Silicon photonic MEMS switches based on split waveguide crossings

Yinpeng Hu,Yi Sun,Ye Lu,Huan Li,Liu Liu,Yaocheng Shi,Daoxin Dai

2023-06-05

Abstract:The continuous push for high-performance photonic switches is one of the most crucial premises for the sustainable scaling of programmable and reconfigurable photonic circuits for a wide spectrum of applications. Large-scale photonic switches constructed with a large number of 2$\times$2 elementary switches impose stringent requirements on the elementary switches. In contrast to conventional elementary switches based on mode interference or mode coupling, here we propose and realize a brand-new silicon MEMS 2$\times$2 elementary switch based on a split waveguide crossing (SWX) consisting of two halves. With this structure, the propagation direction of the incident light can be manipulated to implement the OFF and ON states by splitting or combining the two halves of the SWX, respectively. More specifically, we introduce refractive-index engineering by incorporating subwavelength-tooth (SWT) structures on both reflecting facets to further reduce the excess loss in the ON state. Such a unique switching mechanism features a compact footprint on a standard SOI wafer and enables excellent photonic performance with low excess loss of 0.1-0.52/0.1-0.47dB and low crosstalk of $\lt$-37/-22.5dB over an ultrawide bandwidth of 1400-1700nm for the OFF/ON states in simulation, while in experiment, excess loss of 0.15-0.52/0.42-0.66dB and crosstalk of $\lt$-45.5/-25dB over the bandwidth of 1525-1605 nm for the OFF/ON states have been measured.Furthermore, excellent MEMS characteristics such as near-zero steady-state power consumption, low switching energy of sub-pJ, switching speed of {\mu}s-scale, durability beyond 10^9 switching cycles, and overall device robustness have been achieved. Finally, a 16$\times$16 switch using Benes topology has also been fabricated and characterized as a proof of concept, further validating the suitability of the SWX switches for large-scale integration.

Optics,Applied Physics
Mach-Zehnder Based Optical Switches in Silicon-On-Insulator

Wanjun Wang,Yong Zhao,Ting Hu,Jianyi Yang,Minghua Wang,Xiaoqing Jiang

DOI: https://doi.org/10.1364/acpc.2012.as3b.4

2012-01-01

Abstract:In this paper, we experimentally demonstrated a series of Mach-Zehnder optical switches on silicon-on-insulator, including the 2×2, 1×3 electro-optical switch, 3×3 thermo-optical switch using a single combined phase shifter, four-port broadband electro-optical routing switch.
Symmetrical Design And Analysis Of A Novel Mems-Based 1x2 Optical Switch

Congshun Wang,Jian Cao,Sheng Chang,Jing Fang,Zhenchuan Yang,Dacheng Zhang

2002-01-01

International Journal of Nonlinear Sciences and Numerical Simulation

Abstract:In this paper, a novel bulk micromachined 1x2 optical switch with optical fibre-holding structure is presented with the techniques of silicon-glass wafer bonding and deep reactive ion etch. The micromechanical optical switch includes two symmetrical slope anchors and a flexible beam with mirror, in which the beam is laterally driven by electrostatic actuator. It is important that the optimal design of this symmetrical slope anchor produces large displacement of the mirror with low driving voltage. The dynamic behavior of the switch is analyzed with Intellisuite by the coupling simulation of finite element and the boundary element, the switching time of the structure is also evaluated and the pull-in voltage is achieved by using a numerical iteration. Those optimization analyses offer a reasonable design for the optical switch based on the current fabrication technology.
Fast, High-radix Silicon Photonic Switches.

Tao Chu,Lei Qiao,Weijie Tang,Defeng Guo,Weike Wu

DOI: https://doi.org/10.1364/ofc.2018.th1j.4

2018-01-01

Abstract:With a limited number of built-in power monitors to detect the optimum operating points of all switch units, we demonstrated a 32 × 32 MZI-based silicon electro-optical switch operating with nanosecond speeds.
A non-silicon micro-machining based scalable fiber optic switch

Junfeng Bao,Zhonghui Cao,Ye Yuan,X. Wu

DOI: https://doi.org/10.1016/j.sna.2004.04.014

2004-01-01

Abstract:We report a low-cost non-silicon-based fiber optic switch featuring a novel design of reflection cell, which is capable of ±5V pulse operation and self-latching. The switch prototypes were measured to have a switch time of 2.6ms, return loss of −54dB and a low insertion loss. Enabling technology is precision electrical discharge machining. The dynamic process of switching was analyzed using an FEA software ANSYS for design optimization. A reasonable agreement was obtained between the measurement and calculated results. The switch is scalable to 8×8 or above and allows the realization of high capacity cross-connects.
A CMOS Compatible 1&#x00d7;3 Optical Switch Based on Silicon on Insulator

Wanjun Wang,Yong Zhao,Yubo Li,Yinlei Hao,Jianyi Yang,Minghua Wang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/group4.2010.5643379

2010-01-01

Abstract:A 1×3 optical switch is demonstrated utilizing the 0.8-μm standard CMOS technology. Extinction ratios higher than 21dB are obtained for three states. It is with low power consumption (~7.4mW) and switching time (~15.3ns).
Electro-Optic Polymer Assisted Optical Switch Based on Silicon Slot Structure

Simiao Xiao,Fan Wang,Xiang Wang,Yinlei Hao,Xiaoqing Jiang,Minghua Wang,Jianyi Yang

DOI: https://doi.org/10.1016/j.optcom.2009.03.029

IF: 2.4

2009-01-01

Optics Communications

Abstract:One kind of electro-optic polymer assisted Mach–Zehnder optical switch based on silicon slot structure is presented in this paper. The interference arms of the switch are slot structures instead of regular single-mode waveguides. By filling electro-optic material in the void slot of the arms, direct electro-optic modulation can be introduced. Theoretical model and detailed analysis are given in this paper. The length-independent product VπL is about 74mVcm when slot width is 100nm, and 37mVcm when slot width is 50nm, when the polymer with a electro-optical coefficient of γ33=130pm/V is assisted. An ultralow energy consumption of only 37fJ/bit is achievable, and the turn-on time of the switch is less than 1.5ps.
Non-volatile 2 × 2 optical switch using multimode interference in an Sb2Se3-loaded waveguide

Kun Shang,Lei Niu,Huimin Jin,Haoxian Wang,Wei Zhang,Fuwan Gan,Peipeng Xu

DOI: https://doi.org/10.1364/OL.511301

2024-02-01

Abstract:We propose a non-volatile 2 × 2 photonic switch based on multimode interference in an Sb2Se3-loaded waveguide. The different modal symmetries of the TE0 and TE1 modes supported in the multimode region change their propagation constants distinctly upon the Sb2Se3 phase transition. Through careful optical design and FDTD optimization of the multimode waveguide dimensions, efficient switching is achieved despite the modest index contrast of Sb2Se3 relative to Ge2Sb2Te5. The fabricated optical switch demonstrates favorable characteristics, including low insertion loss of ∼1 dB, a compact length of ∼27 µm, and small cross talk below -15 dB across a 35 nm bandwidth. Such non-volatile and broadband components will be critical for future high-density programmable photonic-integrated circuits for optical communications and signal processing.
Mach-Zehnder based 2×2 electro-optical switches on silicon-on-insulator with low crosstalk

Wanjun Wang,Yong Zhao,Haifeng Zhou,Ting Hu,Jianyi Yang,Minghua Wang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/group4.2012.6324166

2012-01-01

Abstract:We report the demonstrations of two Mach-Zehnder based 2 × 2 electro-optical switches with low crosstalk. One is with assist of variable optical attenuator and the other is based on cascaded Mach-Zehnder interferometer.
Mach-Zehnder based 2X2 electro-optical switches on silicon-on-insulator with low crosstalk

Wanjun Wang,Yong Zhao,Haifeng Zhou,Ting Hu,Jianyi Yang,Minghua Wang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/GROUP4.2012.6324166

2012-01-01

Abstract:We report the demonstrations of two Mach-Zehnder based 2 x 2 electro-optical switches with low crosstalk. One is with assist of variable optical attenuator and the other is based on cascaded Mach-Zehnder interferometer. © 2012 IEEE.
2×2 Electrooptical Switch in Silicon-on-insulator Waveguide

QF Yan,JZ Yu,SW Chen,ZC Fan,JS Xia,ZL Liu

DOI: https://doi.org/10.1109/edssc.2003.1283490

2003-01-01

Abstract:A 2 x 2 Mach-Zehnder interferometer electrooptical switch integrated in silicon-on-insulator using multimode interference 3-dB couplers as splitter and combiner has been proposed and fabricated. Free carriers plasma dispersion effect was utilized to realize light modulation in silicon. Switching operation was achieved at an injection current of 358mA and which can be much reduced by optimizing the PIN structure and improving fabrication process. Extinction ratio of 7.7dB and crosstalk of 4.8dB has been observed.
Non-blocking 8×8 Silicon Electro-Optic Switch

Lei Qiao,Weijie Tang,Tao Chu

DOI: https://doi.org/10.1109/cleopr.2015.7375918

2015-01-01

Abstract:A re-arrangeable non-blocking 8×8 silicon electro-optic switch was demonstrated. It had extinction ratios of 18.3~25.5dB on all "Cross" status and 13.3~19dB on all "Bar" status at 1550nm.
Silicon-based digital optical switch with slot structure

Simiao Xiao,Xiang Wang,Fan Wang,Yinlei Hao,Xiaoqing Jiang,Minghua Wang,Jianyi Yang

DOI: https://doi.org/10.1117/12.837467

2009-01-01

Abstract:In this paper a silicon-based digital optical switch (DOS) with the slot structure is demonstrated. By filling electro-optic polymer in the void slot of the branches, the electro-optic effect can be applied to the DOS, and a high-speed silicon switch with digital switching property can be achieved. Analysis shows that the crosstalk is about 35dB, switching speed is less than lps, and the device length is less than 1mm. © 2009 SPIE.
2/spl times/2 electrooptical switch in silicon-on-insulator waveguide

qingfeng yan,jinzhong yu,shaowu chen,zhongchao fan,jinsong xia,zhongli liu

2003-01-01

Abstract:A 2/spl times/2 Mach-Zehnder interferometer electrooptical switch integrated in silicon-on-insulator using multimode interference 3-dB couplers as splitter and combiner has been proposed and fabricated. Free carriers plasma dispersion effect was utilized to realize light modulation in silicon. Switching operation was achieved at an injection current of 358 mA and which can be much reduced by optimizing the PIN structure and improving fabrication process. Extinction ratio of 7.7 dB and crosstalk of 4.8 dB has been observed.

Nonvolatile Silicon MEMS Optical Switch Based on Bistable Mechanical Beams

Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams

Low-voltage Micromachining-Based Scalable Optical Switch

Scalable Nonblocking &Lt;inline-Formula&gt; &Lt;tex-Math Notation="latex"&gt;$4\times4$ &Lt;/tex-Math&gt; &Lt;/inline-Formula&gt; Silicon Optical Switch Based on Dual-Microring Resonators

Novel MEMS Torsional Mirror Optical Switch

Non-volatile Polarization-Insensitive 1×2 Silicon Optical Switch Using Phase-Change Materials

2 × 2 Silicon Photonic MEMS Switch Based on Split Waveguide Crossing

Silicon photonic MEMS switches based on split waveguide crossings

Mach-Zehnder Based Optical Switches in Silicon-On-Insulator

Symmetrical Design And Analysis Of A Novel Mems-Based 1x2 Optical Switch

Fast, High-radix Silicon Photonic Switches.

A non-silicon micro-machining based scalable fiber optic switch

A CMOS Compatible 1&amp;#x00d7;3 Optical Switch Based on Silicon on Insulator

Electro-Optic Polymer Assisted Optical Switch Based on Silicon Slot Structure

Non-volatile 2 × 2 optical switch using multimode interference in an Sb2Se3-loaded waveguide

Mach-Zehnder based 2×2 electro-optical switches on silicon-on-insulator with low crosstalk

Mach-Zehnder based 2X2 electro-optical switches on silicon-on-insulator with low crosstalk

2×2 Electrooptical Switch in Silicon-on-insulator Waveguide

Non-blocking 8&#x00d7;8 Silicon Electro-Optic Switch

Silicon-based digital optical switch with slot structure

2/spl times/2 electrooptical switch in silicon-on-insulator waveguide

Scalable Nonblocking &Lt;inline-Formula> &Lt;tex-Math Notation="latex">$4\times4$ &Lt;/tex-Math> &Lt;/inline-Formula> Silicon Optical Switch Based on Dual-Microring Resonators

A CMOS Compatible 1×3 Optical Switch Based on Silicon on Insulator

Non-blocking 8×8 Silicon Electro-Optic Switch