Abstract:Novel torsion-mirror actuators with monolithically integrated new fiber holding structures, which can feature self-fixing and self-aligning of optical fibers, are fabricated in regular silicon wafers as well as in SOI wafers by using the mixed micromachining based on the surface and bulk silicon microelectronics. The electromechanical performances of the actuators and the optical properties of their micro-mirrors are investigated experimentally and theoretically. The electrostatic yielding voltages for driving the micro-mirrors of the actuators to tilt from 0° to 90° spontaneously are in the range of 270–290V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° are found 55V or so when the thickness of the torsion-beams suspending the mirrors is about 1μm. Theoretical analysis manifests that the yielding voltage is most sensitive to the beam thickness among the series of design parameters about the torsion-mirror actuator structures. The micro-mirrors of the actuators can cyclically vibrate 108 times at least between 0° and 90°, and their shortest actuating time can reach an estimated less than 2ms. The surface roughness and its distribution of the micro-mirrors of the actuators are small and smooth, respectively, which is acceptable for wavelength division multiplexing applications basically.

Torsion-mirror Actuators with Compound Electrostatic Driving Structures

Micro Torsion Mirror Actuated by Compound Electrostatic Driving Structure

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Electromechanical Studies On Micro Torsion-Mirror Actuators With Monolithically Integrated Fiber Self-Holding Structures

Hybrid Electrostatic Actuator for Micromirror Tilting

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Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process

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Design, Fabrication and Characterization of Novel Micromirror with Vertical Torsion Comb Driver

Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical- System

Novel MEMS Torsional Mirror Optical Switch

Fabrication and electromechanical characteristics of 2×2 torsion-mirror optical switch arrays with monolithically integrated fiber self-holding structures

A Novel Type Of Vertical Torsion Micro-Mirror With Combs

Design of an Electrostatic Silicon Torsion Micromirror for Low Drive Voltage and Wide Angle MEMS Optical Switch Applications

Fabrication Of Compact Turning Mirrors In Silicon-On-Insulator Materials

Torsional mirror with an electrostatically driven lever-mechanism

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Process Platform For High Aspect-Ratio Self-Aligned Vertical Comb Actuators