Design and Fabrication of a F-P Optical Switch Based on MOEMS Technology

徐杨,吴霁虹,刘理天,陈兢,董良
DOI: https://doi.org/10.3969/j.issn.1674-4926.2002.08.011
2002-01-01
Abstract:A micro-optic-mechanical F-P cavity switch with composite membrane driven by electrostatic actuator for fiber-optic communication applications is reported. The area of the switch is 1.5 mm × 1.5 mm. To eliminate the effect of residual stress, the beams are sandwiched layers consisting of oxide/nitride, where the large tensile stress of nitride is partly compensated by the compression stress of oxide. Therefore, the initial deflection is greatly reduced with the mechanical sensitivity increased at the same time. The silicon bulk micromachining is not only useful for decreasing the insertion loss of the switch, but also easily fixing the fibers and their accurate alignment. The driven voltage is about 20 V, and isolation of shutting status is 87% and insertion loss 0.15 dB.
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