Abstract:The MEMS capacitive switch based on fixed-fixed microbeam has garnered significant attention due to their geometric simplicity and broad applicability. The accurate model which describes the multiphysical coupled-field of MEMS capacitive switch should be developed to predict their electromechanical behaviors. The improved macromodel of the fixed-fixed microbeam-based MEMS capacitive switch is presented to investigate the behavior of electrically actuated MEMS capacitive switch in this paper, the macromodel provides an effective and accurate design tool for this class of MEMS devices because of taking account into some effects simultaneously including fringing field effect, midplane stretching effect, residual stress and multiphysical coupled-field effect. The numerical analysis of mechanical characterizations of electrically actuated microbeam-based MEMS capacitive switch are performed by the finite element Newmark method, and the performances of static and dynamic of MEMS capacitive switch are obtained. The numerical results show that, with only a few nodes used in the computation, the FEM-Newmark gives the identical results to other numerical methods, such as the shooting method and experiments. Moreover, the proposed model can offer proper and convenient approach for numerical calculations, and promote design of MEMS devices.

Capacitive Rf MEMS Switch with Composite Beam

A Novel 3-resonance Capacitive RF MEMS Switch

Electromechanical Design of Low-Driven Voltage Capacitive Switches Based on Ka-Bank Distributed MEMS Phase Shifters

Design of A Novel Bulk Micro-Machined Rf Mems Switch

DC-contact Series Radio-Frequency Micro Electromechanical System Switch with Slanting Beams

Design and Analysis of A Micromachined Capacitive Rf Shunt Switch with Composite Membrane

Scalable Contact-Capacitive MEMS Switches with High Capacitance Ratio for Millimeter-Wave Applications

Design and fabrication of X-band capacitive MEMS switches

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

An Analytical Model for High Performance Capacitive RF MEMS Switch Design

Design and Fabrication of a Capacitive Series RF MEMS Switch

Progress on MEMS Switches for Microwave Circuits

Ka-Band Rf Mems Capacitive Switch with Low Loss, High Isolation, Long-Term Reliability and High Power Handling Based on Gaas Mmic Technology

Al/Au Composite Membrane Bridge DC-contact Series RF MEMS Switch

Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure

Numerical Simulation and Analysis of Electrically Actuated Microbeam-Based MEMS Capacitive Switch

Design and Fabrication of a Low Insertion Loss Capacitive RF MEMS Switch with Novel Micro-Structures for Actuation

Study on low voltage actuated MEMS rf capacitive switches

An Ultra-Broadband Contact-Capacitive RF MEMS Switch for 15-110GHZ Applications

A Lateral RF MEMS Capacitive Switch Utilizing Parylene As Dielectric

Investigation of Design and Vibration Modes of Low-Voltage Driven RF MEME Capacitive Switch for Millimeter Distributed Phase Shifter