Abstract:MEMS switches are one of the most promising future micromachined products that have attracted numerous research efforts in recent years. The majority of MEMS switches reported to date employ electrostatic actuation, which requires large actuation voltages. Few are lateral relays and those often require nonstandard post process, and none of them is intended for high-frequency applications. We have developed an electrothermally actuated lateral-contact microrelay for RF applications. It is designed and fabricated on both low-resistivity and high-resistivity silicon substrate using surface micromachining techniques. The microrelay utilizing the parallel six-beam actuator requires an actuation voltage of 2.5-3.5 V. Time response is measured to be 300 mus and maximum operating frequency is 2.1 kHz. The RF signal line has a current handling capability of approximately 50 mA. The microrelay's power consumption is in the range of 60-100 mW. The lateral contact mechanism of the microrelay provides a high RF performance. The microrelay has an off-state isolation of -20 dB at 40 GHz and an insertion loss of -0.1 dB up to 50 GHz. The simplicity of this 4-mask fabrication process enables the possibility of integrating the microrelay with other passive RF MEMS components.

Design and Analysis of a Lateral Lateral DC-Contact MEMS RF Switch with High Performance

Design and fabrication of X-band capacitive MEMS switches

Design and Fabrication of a Low Insertion Loss Capacitive RF MEMS Switch with Novel Micro-Structures for Actuation

Design and Fabrication of DC to 30 GHz DC-contact Shunt RF MEMS Switch

A Low-Voltage Lateral MEMS Switch with High RF Performance

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

Intermodulation Distortion in MEMS Capacitive Switches under High RF Power

Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications

Design of A Novel Bulk Micro-Machined Rf Mems Switch

DISTRIBUTED MULTICONTACT RF MEMS SWITCH FOR POWER HANDLING CAPABILITY IMPROVEMENT

Novel Multicontact Radio Frequency Microelectromechanical System Switch in High-Power–handling Applications

Electro-thermally actuated RF MEMS switch for wireless communication.

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

An Ultra-Broadband Contact-Capacitive RF MEMS Switch for 15-110GHZ Applications

Numerical Analysis of Pull-In Voltage for Contact Mems Switches in Switched-Line Phase Shifter Application

An Analytical Model for High Performance Capacitive RF MEMS Switch Design

Modeling and Analysis of DC-contact RF MEMS Switch Considering Crosstalk Between DC and RF Signals

Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure

Study on RF MEMS Switch with Four Parallel Ohm Contacts for Power Handling Enhancement

Low Voltage, High Speed and Small Area In-Plane MEMS Switch

Implementation of Highly Reliable Contacts for RF MEMS Switches