0.3-&Amp;#x00b5;m Gate-Length Metamorphic AlInAs/GaInAs HEMTs on Silicon Substrates by MOCVD

Haiou Li,Ming Li,Ching W. Tang,Zhen Zhong,Kei May Lau
DOI: https://doi.org/10.1109/icsict.2010.5667636
2010-01-01
Abstract:Fabrication and performance of high-frequency 0.3-μm gate-length depletion-mode metamorphic Al 0.50 In 0.50 As/Ga 0.47 In 0.53 As high electron mobility transistors (mHEMT) grown by Metalorganic Chemical Vapor Deposition (MOCVD) on n-type silicon substrates is reported. Using a combined optical and e-beam photolithography technology, submicron mHEMT devices on Si have been achieved. A maximum trans-conductance up to 739mS/mm was measured. The unity current gain cut-off frequency (f T ) and the maximum oscillation frequency (f max ) were 72.4 and 77.3GHz, respectively. An input capacitance to gate-drain feedback capacitance ratio, Cgs/Cgd, of 6.8 and a voltage gain, g m /go, of 6.9 are observed in the device.
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