1.0 Μm Gate-Length InP-based InGaAs High Electron Mobility Transistors by Mental Organic Chemical Vapor Deposition

Cheng Gao,Hai-ou Li,Jiao-ying Huang,Sheng-long Diao
DOI: https://doi.org/10.1007/s11771-012-1427-1
2012-01-01
Abstract:InGaAs high electron mobility transistors (HEMTs) on InP substrate with very good device performance have been grown by mental organic chemical vapor deposition (MOCVD). Room temperature Hall mobilities of the 2-DEG are measured to be over 8 700 cm 2 /V-s with sheet carrier densities larger than 4.6×10 12 cm −2 . Transistors with 1.0 μm gate length exhibits transconductance up to 842 mS/mm. Excellent depletion-mode operation, with a threshold voltage of −0.3 V and I DSS of 673 mA/mm, is realized. The non-alloyed ohmic contact special resistance is as low as 1.66×10 −8 Ω/cm 2 , which is so far the lowest ohmic contact special resistance. The unity current gain cut off frequency ( f T ) and the maximum oscillation frequency ( f max ) are 42.7 and 61.3 GHz, respectively. These results are very encouraging toward manufacturing InP-based HEMT by MOCVD.
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