Study on PZT /lanio_3/ LaAlO_3 Heterostructures and Its Properties

Shanyi Du
2007-01-01
Abstract:Pb(Zr0.55Ti0.45)O3(PZT) and LaNiO3(LNO) thin films have been deposited by pulsed laser deposition and RF magnetron sputtering on LaAlO3 substrates,respectively.Structural and surface morphologies of LNO layers,which were designed as bottom electrodes,were investigated.(100)-oriented PZT thin films were obtained at an annealing temperature as low as 500 ℃.The C-V and P-E curves measurements showed that samples annealed at 600 ℃ had good dielectric and ferroelectric properties.The Pr and Ec were 28.3 μC/cm2 and 54.1 kV/cm.,respectively.
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