Application Of Computer Microvision And Microscopic Interferometry In Measurement System For Three-Dimensional Static And Dynamic Characterization Of Mems

Yj Xie,Jp Bai,Tl Shi,S Liu
2004-01-01
Abstract:In order to study static and dynamic behaviors of micro-electro-mechanical systems(MEMS)devices with high resolution, which is necessary for the reliability and the optimization of MEMS, computer microvision and microscopic interferometry are applied into MEMS measurement system. This system can be used to measure in-plane-rigid-body motions, surface shapes, out-of-plane motions and deformations of microstructures in a single experiment. A new algorithm of sub-pixel step length correlation template matching based on cubic spline interpolation is proposed to extract the in-plane displacement from vision images with a resolution 0.02 pixel. Hariharan Five-step Phase-Shift Interferometry(PSI)Algorithm and unwrapping algorithms are adopted to measure out-of-plane motions in interferometry system. The out-of-plane displacement resolution is better than 1nm.The capabilities of computer microvision and microscopic interferometry are illustrated with the experimental results of three MIMS devices: a sensor membrane, a microphone membrane, and a microgyro.
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