Rotational-stereo-based vision system for 3-D measurement of silicon-mold of polymer microfluidic chips

Sheng Liu,Peiqiong Yu,Zichen Chen
2004-01-01
Journal of Information and Computational Science
Abstract:A novel rotational-stereo-based micro measurement system (RSMMS) has been developed for 3-D measurement of silicon-mold used for reproduction of polymer microfluidic chips. Referring to the characteristics of micro visual measurement systems, a new measuring technique based on rotational stereo is proposed. The rotational stereo transformation about arbitrary rotation axis in visual space is defined by quaternion representation, and then the detailed steps of measurement are described. Experimental result on micro-mold is presented, which shows the system is developed successfully.
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