Stereovision System For 3-D Measurement Of Mems Components

Sheng Liu,Jianzhong Fu,Jiahao Liu,Kun Ren,Haiming Yang,Zichen Chen
2002-01-01
Abstract:The use of stereoscopic microscope with selective field-of-view improves the recognizability of 3D-shaped micro objects and provides a method for overcoming several essential limitations-in micromanipulation. An optical system was designed and it consists of a stereomicroscope and a CCD to obtain the stereo images of micro-mechanical part. These images are the input data for the following stereovision software module, from which the 3-D model of the micro object can be generated.
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