3D Measurement System of Micro-Organization Based on Two-Ray-path Scanning

Xiaolei Shan,Dongxian Zhang,Chao Liu,Haijun Zhang
DOI: https://doi.org/10.1117/12.819668
2008-01-01
Abstract:A 3D measurement system of micro organization based on two-ray-path scanning was developed. This article introduced the principle and setup of the system. Experiments were carried out to measure the three-dimensional shape of some micro organizations. The results showed that this system could measure accurately not only the thickness of each part of the micro organization, but also can show its three-dimensional shape quickly and accurately. The vertical error was less than 2 μm. This system has advantages of compact structure, accurate detection, and high reliability, and can realize nondestructive measurement of micro organization.
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