Abstract:Microelectromechanical systems (MEMSs) have been growing rapidly over recent years. However, measurement of their motions is a difficult problem. A laser Doppler interferometric system for measuring the instantaneous velocity and displacement of the periodic and nonperiodical in-plane and out-of-plane motions of the vibrating combs simultaneously has been developed. The working principle and optical diagram of the system are explained. The instantaneous velocity and displacement of vibrating combs are acquired by demodulating the frequency modulated Doppler signal by using a phase-locked loop. The developed laser Doppler interferometer provides a powerful means in studying the performance of the MEMS devices, particularly in studying their vibration modals. Modal analyses of the vibrating combs are carried out theoretically and experimentally. Due to the nonrigid structure of the MEMS resonator besides the basic modal there are also high order modals in the MEMS vibration. The basic modal is the desired in-plane lateral vibration. The second order vibration is a torsion vibration about the axis perpendicular to the fingers of the movable combs. Both third and fourth order vibrations are lateral bending of the supporting beams. The measured experimental data are presented. The accuracy of the developed interferometer has been checked by an acceleration calibrator.

Integrated Measurement Of Micro Motions For Mems Dynamic Performance Analysis

Optical Measuring Methods for Dynamic MEMS Characterization

Measurement Technique of In-Plane Motion for MEMS Based on Blur Image Synthesis

Measurement System For Mems Dynamics Characterization With Environmental Control Facility

Measurement Technique of In-plane Motion for MEMS Based on Machine Micro-vision

In-plane-rigid-body Motions on Strobo Scopic Imaging Method

Micro-Motion Analyzer Used for Dynamic Mems Characterization

Stroboscopic Interferometer For Out-Of-Plane Motion Measurement Of Mems/Nems With Nano-Resolution

MEMS Test System Based on Virtual Instrument Technology

Studies of dynamic properties of MEMS and NEMS using a three dimensional nano-imager

Micro-motion Analyzer Used to Dynamic Behavior of MEMS Devices

Measuring In-plane Motion of Micro-MEMS Based on Optical Flow

Application Of Computer Microvision And Microscopic Interferometry In Measurement System For Three-Dimensional Static And Dynamic Characterization Of Mems

Stroboscopic Interferometer for Dynamic MEMS Characterization

Image Based MEMS Dynamics Characterization System

Measurement System for Static and Dynamic Characterization of MEMS Based on Stroboscopic Imaging

Measurement System for 3D Static and Dynamic Characterization of MEMS

Mems Motion Measurement System Using Differential Laser Doppler and Its Key Techniques

Microelectromechanical Systems Motion Measurement and Modal Analysis Based on Doppler Interferometry

An Image Capture Control Method For Mems Micro-Structure Out-Of-Plane Dynamic Characterization

Application of machine micro-vision in testing in-plane motions for MEMS micro-structures