Research on Two Optical Methods for Aspheric Measurement

Zhu Yongjian,Yin Shaohui,Sheng Xiaomin,Tang Kun

DOI: https://doi.org/10.3321/j.issn:1004-132x.2009.03.005

2009-01-01

Abstract:To realize the 3D profilometry,a four-step phase shifting method integrated with fringes projection was adopted.In the fringe-projection profilometry,a computer-simulated fringe patterns was projected on the free-form surface of object and the fringes were captured by the phase-shifting technique.Automatic image-processing software with the proposed DCT-based phase-reconstructing algorithm was developed to reconstruct the continuous phase map from fringe patterns.The final 3D profile of object was obtained from the phase map.The corresponding experiments were conducted independently.In interferometry,a new-type interferometer was proposed,which combined the radial shear interferometer with simultaneous phase-shifting technique.It was based on the optical path with two Jamin glass plates and realized the collection of four frames of fringe patterns according to the principle of polarized light.It can test the full-field surface with different sizes and be free from vibration.The theoretical accuracy of this interferometer can reach 1/100 wavelength.Because it enjoys high anti-Jamming performance,the proposed interferometer can realize the high-precision dynamic measurement of aspheric surface under the common conditions without any vibration-isolated setup.