Room-Temperature Blue Luminescence of Thermally Oxidized Si1-X-Ygexcy Thin Films on Si (100) Substrates

Xm Cheng,Yd Zheng,Xb Liu,L Zang,Zy Lo,Sm Zhu,P Han,Rl Jiang
DOI: https://doi.org/10.1063/1.125342
IF: 4
1999-01-01
Applied Physics Letters
Abstract:We measured at room temperature the photoluminescence spectra of the thermally oxidized Si1-x-yGexCy thin films which were grown on silicon substrates by plasma-enhanced chemical vapor deposition and then wet oxidized at 1100 degrees C for 20 min. The photoluminescence band with a peak at similar to 393 nm under the exciting radiation of lambda = 241 nm was observed. Possible mechanism of this photoluminescence is discussed. (C) 1999 American Institute of Physics. [S0003-6951(99)01147-X].
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