Origin of Photoluminescence Peaks in Ge–SiO2 Thin Films

C. N. Ye,X. M. Wu,N. Y. Tang,L. J. Zhuge,W. G. Yao,J. Chen,Y. M. Dong,Y. H. Yu
DOI: https://doi.org/10.1016/s1468-6996(02)00024-4
IF: 7.821
2002-01-01
Science and Technology of Advanced Materials
Abstract:Ge-SiO2 thin films were prepared by the RF magnetron sputtering technique on p-Si substrates from a Ge-SiO2 composite target. The as deposited films were annealed in the temperature range of 300-1000 degrees C under nitrogen ambience. The structure of films was evaluated by X-ray diffraction, X-ray photoemission spectroscopy and Fourier transform infrared absorption spectroscopy. Results show that the content of Ge and its oxides in the films change with increasing annealing temperature (Ta), the photoluminescence (PL) characteristics are closely dependent on the contents of Ge and its oxides in SiO2 matrix. The dependence observed strongly suggests that the PL peak at 394 nm is related to the existence of GeO and 580 nm to that of Ge nanocrystal (nc-Ge) in the films. (C) 2002 Elsevier Science Ltd. All rights reserved.
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