Strong violet emission from Ge–SiO2 co-sputtered films annealed in O2 atmosphere

J.K Shen,X.L Wu,X.M Bao,R.K Yuan,J.P Zou,C Tan
DOI: https://doi.org/10.1016/S0375-9601(00)00492-8
IF: 2.707
2000-01-01
Physics Letters A
Abstract:Photoluminescence (PL) spectra of Ge–SiO2 co-sputtered films annealed under O2, N2, and air were examined using the 250 nm excitation line of Xe lamp. Violet and ultraviolet PL peaks were observed at ∼400 and ∼300 nm. The two peaks were found to have a similar behavior with annealing temperature. Their maximal intensities appear in the sample annealed at 800°C and in O2 atmosphere. Fourier transform infrared absorption results suggest that the two PL peaks are closely related to Ge oxide in the samples. The PL excitation spectral examinations indicate that they arise from optical transitions in GeO color centers. The existence of oxygen during annealing improves the GeO density in the samples and makes the PL intensities enhanced largely. Our experiments provide a way for improving the violet and ultraviolet PL intensities, which will be more useful in device applications.
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