Strong Violet Emission from Ge-SiO2 Co-Sputtered Films Annealed in O2

沈今楷,吴兴龙,袁仁宽,谭超,鲍希茂
DOI: https://doi.org/10.3321/j.issn:0253-4177.2001.09.009
2001-01-01
Abstract:Photoluminescence (PL) spectra of Ge-SiO2 co-sputtered films annealed in O2, N2 and air were examined respectively by a 250 nm excitation line of Xe lamp. Violet and ultraviolet PL peaks were observed at 400 nm and 300 nm, which are of the similar behavior at one annealing temperature. The maximal intensities appear when the sample is annealed at 800°C in O2. The Fourier transform infrared spectroscopy shows that the two PL peaks are closely related to Ge oxide in the samples. The PL excitation spectral examination proves that they originate from the optical transition in GeO color centers. The existence of oxygen during the annealing can improve the GeO density in the samples and enhance the PL intensities greatly. A new way for improving the violet and ultraviolet PL intensities was provided, which is useful in the device applications.
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