Abstract:We report the observation of visible-light emission from crystallized a-Si:H thin films and a-Si:H/a-SiNx:H multi-quantum well (MQW) structures, which were deposited on SiO2/Si substrates by a plasma enhanced chemical vapor deposition system and subsequently crystallized by a KrF excimer laser. Transmission electron microscopy technology revealed the formation of fine grain-sized nanocrystallites with diameter about 10 nm. X-ray diffraction and Raman scattering spectra showed spectral peaks corresponding to crystalline Si (c-Si) (111) face. Room temperature visible photoluminescence (PL) emission was observed both from crystallized a-Si:H films and multi-quantum well structures, with peak emission energy around 2.0 eV. The ability to fabricate visible luminescent Si films by a method compatible with the currently mature Si-based microelectronics technology, can provide a promising means in the realization of optoelectronic devices.

Strong room temperature photoluminescence of a-SiNx:H films

A Study on Strong Room Temperature Photoluminescence of A-Sinx : H Films

Light Emission Properties and Mechanism of Low-Temperature Prepared Amorphous Sinx Films. I. Room-Temperature Band Tail States Photoluminescence

Room-temperature visible photoluminescence from nanocrystalline Si in Si/SiNx superlattices

Photoluminescence of Tb3+ Doped SiNx Films Grown by Plasma-Enhanced Chemical Vapor Deposition

Microstructure and photoluminescence properties of as-deposited and annealed Si-rich a-Si1−xCx:H films

Room Temperature Visible Photoluminescence from Crystallized Nano-Si Thin Films

Strong Green Light Emission from Low-Temperature Grown A-Sinx:H Film after Different Oxidation Routes

Research on Photoluminescence and Electroluminescence of Si-Rich SiN Films

Light Emission from Si Nanoclusters Formed at Low Temperatures

A detailed photoluminescence study of crystallized a-Si:H multiquantum-well structures

Photoluminescence of Tb3+-doped SiNx films with different Si concentrations

Room-temperature Photoluminescence of Doped 4H-Sic Film Grown on AlN/Si(100)

High Temperature Annealing Behaviors of Luminescent SiO x ∶H Films

A New Luminescent Defect State in Low Temperature Grown Amorphous SiNxOy Thin Films

Short-wavelength Photoluminescence from Silicon and Nitrogen Coimplanted SiO2 Films

Pseudo nanocrystal silicon induced luminescence enhancement in a-Si /SiO2 multilayers

Strong Blue Light Emission from A-Sinx:O Films Via Localized Surface Plasmon Enhancement

Influence of annealing on microstructures and photoluminescence of nano-composite silicon film

Visible photoluminescence in crystallized amorphous Si:H/SiN<i>x</i>:H multiquantum-well structures

Tunable Light Emission and Decaying Process of Photoluminescence from A Nanostructured Si-In-Sinx Film