Light Emission from Si Nanoclusters Formed at Low Temperatures

XD Pi,OHY Zalloum,T Roschuk,J Wojcik,AP Knights,P Mascher,PJ Simpson
DOI: https://doi.org/10.1063/1.2183813
IF: 4
2006-01-01
Applied Physics Letters
Abstract:Photoluminescence (PL) from amorphous Si nanoclusters (Si-ncls) formed by thin-film deposition via electron-cyclotron resonance plasma-enhanced chemical vapor deposition followed by annealing at temperatures ⩽875°C has been investigated. We find that Si-ncls grow very slowly after their initial nucleation at low temperatures. An increase in the size of Si-ncls, which can be controlled by the annealing temperature, induces a redshift in the Si-ncl PL peak. While the emitted optical power is more than 100 times smaller than that of Si nanocrystals formed in an identically deposited film, it is increased by a factor of up to approximately four times following hydrogen passivation. The incorporation of hydrogen causes a redshift in the PL peak position, suggesting a partial hydrogenation induced bond distortion of the Si-ncls. This redshift decreases with increasing hydrogen ambient annealing temperature.
What problem does this paper attempt to address?