Room Temperature Ultraviolet Photoluminescence from 800°C Thermally Oxidized Si, 1-x-y Ge x C y Thin Films on Si(100) Substrate

X. M. Cheng,Y. D. Zheng,L. Zang,X. B. Liu,S. M. Zhu,Z. Y. Lo,P. Han,R. L. Jiang
DOI: https://doi.org/10.1557/PROC-592-165
2000-01-01
Abstract:The thermally oxidized Si 1-x-y Ge x C y thin films were grown on silicon substrates by Plasma-enhanced Chemical Vapor Deposition (PECVD) and then wet oxidized at 800°C for 20 minutes. Photoluminescence spectra of the samples were measured at room temperature under 250nm excitation. Two ultraviolet photoluminescence bands with the peaks at ~370nm and ~396nm were observed in the oxidized samples. Possible mechanism of this photoluminescence is discussed.
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