Analysis of Micro-forces Between Micro-parts and Their Infulence Factors in MEMS and Micro-manpiulation

LI Gui-xian,PENG Yun-feng,ZHANG Xin
DOI: https://doi.org/10.3969/j.issn.1005-9830.2005.05.018
2005-01-01
Abstract:According to the interaction relationships between the micro-parts in MEMS,and the manipulation tools and the micro-objects in micro-manipulation,three models are simplified to represent these interaction relationships firstly,with which the negative-power law relationship characteristics of micro-forces between the micro-parts and their distance are reflected.Then based on these models,the micro-forces are analyzed and formulted.Finally,the influence factors of the micro-forces,such as surface condition,media and constitutive material of the micro-parts are discussed.The result shows that the surface condition is the most important factors in determination of the micro-forces.An influence coefficient of surface roughness is introduced,which facilitates the analysis of the influence of surface condition on micro-forces.
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