Friction and wear properties in MEMS

Weiyuan Wang,Yuelin Wang,Haifei Bao,Bin Xiong,Minhang Bao
DOI: https://doi.org/10.1016/S0924-4247(01)00821-4
2002-01-01
Abstract:Recent researches on friction and wear in MEMS were reviewed and discussed in this paper. Friction, a major problem for many micro actuators in MEMS, has been actively investigated based on the results from both scientific instruments and microstructures of practical dimensions. The surface effects influencing the frictional behavior in MEMS were discussed. Based on the proposed differential friction coefficient, the expressions for friction, the friction properties for micro and macro scales were compared. The measures to reduce the friction and wear in MEMS were also discussed.
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