Experimental Study of Tribological Performance on Silicon Micro-textured Surface

Dong Yunkai,Zhang Xiangjun,Liu Ying,Wen Shizhu
DOI: https://doi.org/10.3969/j.issn.0254-0150.2008.01.001
2008-01-01
Abstract:The tribological property of moveable components has been one of the key factors affecting the performance and reliability of MEMS.To study the tribological performance of micro-components,a new flat-flat micro-tribotester was developed to simulate the real situations in MEMS.With the friction study of silicon micro-textured surfaces,it is shown that the friction coefficient is greatly affected by sliding velocity,and there is an optimization parameter of surface topography that can decrease friction coefficient and the effects of sliding speed.
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