An on-chip micro-friction tester for tribology research of silicon based MEMS devices

Zhanshe Guo,Yonggang Meng,Caijun Su,Hao Wu

DOI: https://doi.org/10.1007/s00542-007-0413-2

2007-01-01

Microsystem Technologies

Abstract:An on-chip micro-tribotester has been developed to investigate the friction and wear properties on side contacting surfaces of single crystal silicon that is most widely used in usual microelectromechanical systems actuators. The device is fabricated with standard bulk silicon process and bonding technology based on parameters that have been theoretically calculated to get the stiffness and friction forces. In this device, two comb shuttles are used. One comb shuttle is used to contact the friction surfaces under a certain normal load. The other comb shuttle moves back and forth to provide relative motion between the two friction surfaces. The tested two surfaces are the top surface of an anchor with rounded end and the lateral surface of a beam that has been connected to the two comb shuttles. Tribology experiments on the etched silicon surfaces that are side contacted have been carried out. Friction coefficients testing results suggest that dynamic friction coefficient is about 0.31–0.33 and the obtained static friction coefficient increases with the decrease of normal force. Wear experiment indicates that oxidation happens between the rubbing surfaces during the course of the testing. Wear debris is collected as agglomerates because of the function of adhesion force and water vapor and the agglomerates that are collected on top and lateral surfaces are of different shapes.