Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

A Micro-Tribotester for Evaluating Friction and Wear on Side Contacting Surfaces in Bulk-Microfabricated Devices

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester

A Single Crystal Silicon Based Micro-tribotester and Testing

A Connected-Type Micro-Tribotester and Its Design

On-chip testing method for measurements of friction and wear in moveable MEMS devices

Running-In of Sidewall Friction in Bulk-Fabricated Microtribotester

Design and Construction of a Micro-Tribotester for Precise In-Situ Wear Measurements

Design Of A Composite Microtribology Experiment System For Silicon Sidewalls

Experimental Study of Tribological Performance on Silicon Micro-textured Surface

Design and Testing of Micro-Tribometer with Macro Applied Load

Characterisation Of Tribological Behaviour Of Silicon And Ceramic Coatings Under Repeated Sliding At Micro-Scale

Effect of Surface Energy on the Wear Process of Bulk-Fabricated Mems Devices

Design and Built of a Micro-Tribometer with High Vacuum and Low Temperature

Measurement of Slips at Contact Interfaces Using a Self-Powered Sensor Based on Triboelectric Nanogenerators

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment

An New Instrument for Measuring Mechanical Compliance of Micro-Systems

Design of Self-Adaptive Micro-Tribology Multiple-Measuring Test Rig and Experimental Studies on Nano-Lubrication

Characterization of Micro-Contact Properties Using a Novel Micromachined Apparatus

Design and construction of a novel tribometer with on-line topography and wear measurement

Development of Tribo-tester for Tribological Studies of Piston Ring/Bore Pair