Analysis of micro-forces between micro-parts and their influence factors in MEMS

LI Gui-xian,PENG Yun-feng,Xin Zhang,李瑰贤,彭云峰,张欣
2008-01-01
Abstract:The research of micro-forces between micro-parts forms the base for micro-machine (MEMS) development. According to the characteristics of the interactions between micro-parts in MEMS, three models were simplified. Based on these models, micro-forces between micro-parts were analyzed, and the analytical formulas were formulated. Factors which may affect the micro-forces, such as surface condition, media and constitutive material of micro-parts were discussed. A coefficient of surface roughness on micro-forces was introduced, which facilitated the analysis of the influence of surface roughness.
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