Control of Micro Stick-Slip and Stiction in MEMS

ZHANG Xiang-jun,MENG Yong-gang,WEN Shi-zhu
DOI: https://doi.org/10.3969/j.issn.1672-6030.2005.02.003
2005-01-01
Nanotechnology and Precision Engineering
Abstract:Micro stick-slip and stiction failure are familiar phenomena in microelectromechanical systems due to the dominant role of various surface forces including electrostatic force, van der Waals force and capillary force. Based on adhesion contact model, a dimensionless stick-slip number is proposed, which implies that micro stick-slip behavior results from a comprehensive function of surface properties, topography, contact load and sliding velocity. Therefore, critical parameters of micro stick-slip are obtained as well as the control measures, in which a proper design of wave length of topography is suggested. Additionally, capillary force-induced stiction behavior is investigated based on deformation of a micro cantilever, critical point of stiction is obtained, which provides structure design principle for the avoidance of stiction of micro cantilever.
What problem does this paper attempt to address?