Control of Stick-slip Phenomenon on Silicon Interface under Relative Humidity Conditions

Dong Yunkai,Liu Ying,Zhang Xiangjun,Wen Shizhu
DOI: https://doi.org/10.3969/j.issn.0254-0150.2007.04.001
2007-01-01
Abstract:The micro friction behaviors of clean silicon surface,dimpled surface and OTS film were investigated in the situations of micro load and various relative humidity levels by a laboratory-made micro-tribotester.Results show that OTS film and dimpled surface can prevent the presence of stickslip phenomenon at high relative humidity levels compared to bare silicon surfacce.With the theoretically study of the effect of liquid bridge on friction under relative humidity conditions,it can be primarily concluded that the friction force consists of three shearing forces coming from the solid-solid,solid-liquid and liquid-liquid interfaces.Furthermore,the appearance of the stick-slip phenomenon depends on the competing relationship between the three shearing forces.
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