Effect of Micro-Dimple Patterns on Capillary Pull-off Force and Friction Force of Silicon Surface

Zhang Xiang-Jun,Dong Yun-Kai,Liu Bong-He,J. A. Schaefer
DOI: https://doi.org/10.1088/1674-1056/18/1/038
2009-01-01
Abstract:A microtribometer is used to measure and compare pull-off forces and friction forces exerted on(a) micro-dimpled silicon surfaces,(b) bare silicon surfaces,and(c) octadecyltrichlorosilane(OTS) treated silicon surfaces at different relative humidity(RH) levels separately.It is found that above a critical RH level,the capillary pull-off force increases abruptly and that the micro-dimple textured surface has a lower critical RH value as well as a higher pull-off force value than the other two surfaces.A micro topography parameter,namely sidewall area ratio,is found to play a major role in controlling the capillary pull-off force.Furthermore,micro-dimpled silicon surface is also proved to be not sensitive to variation in RH level,and can realize a stable and decreased friction coefficient compared with un-textured silicon surfaces.The reservoir-like function of micro dimples is considered to weaken or avoid the breakage effect of liquid bridges at different RH levels,thereby maintaining a stable frictional behaviour.
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