Effects of Load and Relative Humidity on Micro-friction

Tao Qing,Tianmin Shao,Shizhu Wen
DOI: https://doi.org/10.3969/j.issn.0254-0150.2006.10.002
2006-01-01
Abstract:Effects of the load and relative humidity on the maximum static friction and sliding friction of Si (100) wafer were studied under micro-loads using a self-built apparatus for micro-friction tests. The test results show that effects of the load and relative humidity on micro-friction are significant. Both the maximum static friction force and sliding friction force increase with loads, and the friction coefficients of them decreased with loads. The maximum static friction force goes up with the relative humidity. Sliding friction force ascends with the relative humidity under lower loads, and then it would descend under higher loads. Effects of the relative humidity are remarkable under lower loads. But under higher loads, it would be insignificant. Based on single asperity contact model, a formula was built which describes the relationship between the relative humidity and friction force.
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