RESEARCH ON COUPLED ELECTRO-MECHANICAL ANALYSIS AND APPLICATION FOR TYPICAL COMPONENTS IN MEMS

王丛舜,张为斌,方竞,崔云俊,沈健,昌盛

DOI: https://doi.org/10.3321/j.issn:1001-9669.2001.04.023

2001-01-01

Abstract:Electro-mechanical coupling is an important characteristic of most micro-electro-mechanical systems (MEMS). Coupled electro-mechanical analyses of some typical micro-components such as parallel capacitor structure, cantalever structure and end-fixed beam structure, are presented based on a combination of boundary element method (BEM) and finite element method (FEM), to compare with the results from other softwares and approximate theory. Mechanical deformation of the microstructure is determined with the help of finite element computation by acting the obtained electronic charges as the external forces. This could be a common application of FEM by meshing the structure, specifying the material properties and boundary conditions. Most structures in MEMS components undergo deflection or movement, that results in big changes of the electrical field so that the charge distribution must be recomputed by BEM, based on the present configuration of the deformed structure whose surfaces form new boundaries of the boundary element analysis. The newly obtained electrostatic forces are then applied to redeform the structure and the computations of the multi-field are performed so forth. Then the coupled electro-mechanical analysis is applied in the design of bulk-micromachined relay and the measurement of residual stress.