Electro-mechanical Coupling Analysis of MEMS Structures by Boundary Element Method

Zhang Kai,Cui Yunjum,Xiong Chunyang,Wang Congshun,Fang Jing
DOI: https://doi.org/10.1007/bf02484264
2004-01-01
Abstract:In this paper, we present the applications of Boundary Element Method (BEM) to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems (MEMS). The algorithm is programmed in our research group based on BEM modeling for electrostatics and elastostatics. Good agreement is shown while the simulation results of the pull-in voltages are compared with the theoretical/experimental ones for some examples.
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