Abstract:Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be explored effectively and utilized optimally. A simplified parallel-plate capacitor model is proposed to investigate the resonance response, inherent nonlinearity, stiffness softened effect and coupled nonlinear effect of the typical electrostatically actuated MEMS devices. Many failure modes and mechanisms and various methods and techniques, including materials selection, reasonable design and extending the controllable travel range used to analyze and reduce the failures are discussed in the electrostatically actuated MEMS devices. Numerical simulations and discussions indicate that the effects of instability, nonlinear characteristics and reliability subjected to electrostatic forces cannot be ignored and are in need of further investigation.

Experiment and simulation study of instability of a novel electrostatic MEMS relay

RESEARCH ON PULL-IN AND RELEASE PHENOMENON OF ELECTROSTATIC MICROPUMPS

Testing and simulation of comb-driven MEMS relay by applying digital image correlation technology

Multi-physics Analysis of an Electrostatically Actuated Microcantilever in Viscous Fluids

Fabrication Technology and Dynamic Characteristic of a New Type MEMS Bi-Stable Electromagnetic Relay

Numerical Simulation of A Bulk Micromachined Relay with Lateral Contact

Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage.

Study Of A Micro Electromagnetic Relay Based On Mems

Development of a Novel Electric-Thermal-Driven MEMS Micro-Relay

Finite Element Analysis of Magnetic Structures for Micro-Electro-mechanical Relays

Development of a Novel Bi-stable MEMS Electromagnetic Microrelay

Design and fabrication of a magnetic bi-stable electromagnetic MEMS relay

Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

Research of a New Type MEMS Electromagnetic Relay

Modeling and Experimental Verification of Contact Sliding Behavior for Flexible Spring Components within Electromechanical Relays

Unstable Electrical Contact Behaviors At Nanoscale For Mems Switch

Analysis and Measurement of Residual Stress in Bridge Membrane MEMS Relays

Mechanical and Electrical Characteristics of the Electromagnetic Relay under Vibration and Shock Environment

Vacuum Bouncing Dynamics Dominated by Van Der Waals Forces in Mems Relays

Modeling and Simulation of Hermetically Sealed Electromagnetic Relay under Mechanical Environment.

Electro-mechanical Coupling Analysis of MEMS Structures by Boundary Element Method