Numerical Simulation of A Bulk Micromachined Relay with Lateral Contact

ZC Yang,ZH Li,ZY Xiao,YL Hao,GY Wu
DOI: https://doi.org/10.1117/12.483185
2002-01-01
International Journal of Nonlinear Sciences and Numerical Simulation
Abstract:A bulk micromachined relay with lateral contact structure is presented in this paper. The relay is fabricated with glass/silicon wafer bonding and deep reactive ion etching (DRIE) process. It is laterally driven with electrostatic actuator. The threshold voltage of the relay is simulated using Reduced Order Modeling (ROM) methods provided by a general finite element simulator, ANSYS(TM). The simulated result and experimental result are compared and discussed.
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