Adhesive Elastic Interaction of Micro Punch Pre-Contact

Guixian Li,Az U
2006-01-01
Abstract:Analysis of the pressure distribution and deformation of a microstructure is important for micro-electro mechanical systems(MEMS) and surface physics.Here,a micro-punch whose shape follows a power function is presented.First, the intermolecular force on the micro punch was given and approximated with Maugis-Dugdale potential and also the liquid bridge forces.Second,the deformation in vertical direction of the Maugis-Dugdale micro punch was calculated.Finally,a special micro punch whose top shape is spherical was given and the influence of liquid bridge volume on its deformation pre-contact was studied.It was found that the relationship of micro punch deformation and two factors of liquid bridge volume fluctuates when the distance between micro punch and half-space is small,which shows the micro scale effect of MEMS.When the distance is larger,the deformation increases with the liquid bridge volume in general.
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