Indentation of A Square Elastomeric Thin Film by A Flat-Ended Cylindrical Punch in the Presence of Long-Range Intersurface Forces

BF Ju,KT Wan,KK Liu
DOI: https://doi.org/10.1063/1.1812822
IF: 2.877
2004-01-01
Journal of Applied Physics
Abstract:This paper reports an experimental study of the elastic deformation of a 200μm thick microfabricated square membrane with sides ranging from 8.5mmto15mm as indented by a fine cylindrical, flat-ended punch with diameter 500μm in the presence of long-range intersurface forces. An apparatus was constructed to allow simultaneously measurements of the indenter displacement and the applied force. A number of interesting phenomena such as the “jump-into-contact” and the “pull-off” between the membrane and the moving cylinder were observed. A simple theoretical analysis using linear elasticity was adopted to fit the load-displacement curve (compliance) and thus estimated the Young’s modulus of the membrane. The measured parameters are consistent with data reported in literature.
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