Attitude Manipulation Analysis of Micro Sphere

BW Guo,DR Chen,JD Wang

DOI: https://doi.org/10.1117/12.521352

2003-01-01

Abstract:With the development of micro sensors, micro actuators and micro components, Micro Electro Mechanical Systems (MEMS) have been researched more and more widely. Micro manipulation is the key technique to assembly and test MEMS. The previous researches show that the dominant mechanisms are not gravity but van der Waals, electrostatic and capillary forces. Many works focused on developing varied methods of manipulation that could grip or release micro objects by utilizing these micro forces or reducing them. In order to achieve complex manipulation, a simple attitude manipulation (rolling manipulation and spinning manipulation) method for micro spheres is analyzed in this paper. The models include the interactions among micro objects such as van der Waals and elastic contact forces. The results of the models show the great influence of van der Waals force on the manipulation and provide relevant evidence to the manipulation control.