High-performance Fully Depleted Silicon Nanowire (diameter /spl Les/ 5 Nm) Gate-All-around CMOS Devices
N. Singh,A. Agarwal,L. K. Bera,T. Y. Liow,R. Yang,S. C. Rustagi,C. H. Tung,R. Kumar,G. Q. Lo,N. Balasubramanian,D. -L. Kwong
DOI: https://doi.org/10.1109/led.2006.873381
IF: 4.8157
2006-01-01
IEEE Electron Device Letters
Abstract:This paper demonstrates gate-all-around (GAA) n- and p-FETs on a silicon-on-insulator with <= 5-nm-diameter laterally formed Si nanowire channel. Alternating phase shift mask lithography and self-limiting oxidation techniques were utilized to form 140- to 1000-nm-long nanowires, followed by FET fabrication. The devices exhibit excellent electrostatic control, e.g-, near ideal subthreshold slope (similar to 63 mWdec), low drain-induced barrier lowering (similar to 10 V/V), and with I-ON/I-OFF ratio of similar to 10(6). High drive currents of similar to 1.5 and similar to 1.0 mA/mu m were achieved for 180-nm-long n- and p-FETs, respectively. It is verified that the threshold voltage of GAA FETs is independent of substrate bias due to the complete electrostatic shielding of the channel body.