Room. Temperature Coulomb Blockade Oscillations In Gate-All-Around Silicon Nanowire (Radius Similar To 2nm) N-M Sfets

N. Singh,A. Agarwal,W. W. Fang,L. K. Bera,R. Kumar,G. Q. Lo,N. Balasubramanian,D. L. Kwong
2006-01-01
Abstract:We demonstrate gate-all-around (GAA) n-FETs on SOI with laterally formed Si-nanowire (SiNW) of diameter similar to 5 nm as the channel body. We utilized alternating phase shift mask lithography and self-limiting-oxidation techniques to form 140 to 1000 nm long nanowires, followed by FET fabrication. High drive current of similar to 1.5 mA/mu m with excellent electrostatic control - subthreshold slope of similar to 63mV/dec, DIBL of similar to 10mV/V and I-ON/I-OFF,. ratio of similar to 10(6) - are achieved for 180 nm long devices. It is verified that the threshold voltage of the GAA FETs is independent of substrate bias due to the complete electrostatic shielding of channel body. Systematic room temperature CB oscillations with high PVCR (9.1) at a current level of 30 to 40 nA are observed in many of the devices fabricated on ultra narrow (similar to 2 nm radius) and long (>= 200 nm) SiNWs. It makes the GAA SiNW devices the excellent candidates to be used as single electron transistors.
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