Vertical Silicon Nanowire CMOS Inverter

Zhixian Chen,Xiang Li,Aashit Kamath,Xinpeng Wang,Kavitha Buddharaju,Jian Wang,Rukmani Sayanthan,Kay Thi Win,Navab Singh,Guo Qiang Lo,Dim-Lee Kwong
2012-01-01
Abstract:Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore Science Park II, Singapore 117685 (e-mail: chenzx@ime.a-star.edu.sg) Abstract. Vertical Si nanowire (SiNW) gate-all-around MOSFETs with Ni-silicided nanowire tip is presented. The fabrication process is top-down CMOS compatible and is similar to previously reported vertical SiNW tunneling FETs (TFETs) where silicidation at the nanowire tip is done to segregate dopants at the channel interface for an abrupt junction. Also, for the first time, we demonstrate threshold voltage tuning through opposite doped poly-Si gate, ie. p+ poly-Si gate for n-MOSFET and n+ poly-Si gate for p-MOSFET. The devices exhibit fair performance (SS < 100mV/dec, Ion/Ioff > 10) slightly degraded due to Schottky barrier formation. Most significantly, this work paves the way for future MOSFET/TFET integration.
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