CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack

Peng, J.W.,Singh, N.,Lo, G.Q.,Kwong, D.L.,S. J. Lee
DOI: https://doi.org/10.1109/IEDM.2009.5424284
2009-01-01
Abstract:Ge/Si core/shell gate-all-round nanowire pMOSFET integrated with HfO2/TaN gate stack is demonstrated using fully CMOS compatible process. Devices with 100 nm gate length achieved high ION of ~946 ¿A/¿m at VG - VT = -0.7 V and VDS = -1 V and on/off ratio of 104 with decent subthreshold behavior. Significant improvement in hole mobility and ballistic efficiency is demonstrated as a result of core/shell channel architecture.
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