Stability of P-type Conductivity in Nitrogen-Doped MgZnO Thin Film

GAO Li-li,LI Song-fei,CAO Tian-fu,ZHANG Xue
DOI: https://doi.org/10.3788/yjyxs20153006.0925
2015-01-01
Chinese Journal of Liquid Crystals and Displays
Abstract:Using radio frequency magnetron sputtering,p-type N doped Mg0.1 3 Zn0.8 7 O film was depos-ited on quartz substrate with Mg0.0 6 Zn0.94 O target.The film has resistivity of 42.45 W · cm,Hall mobility of 0.40 cm2 ·V-1 ·s-1 and carrier concentration of 3.70×10 1 7/cm3 .The stability of p-type conductivity in this film preserved in room temperature air ambient was studied.It is found that the re-sistivity increased and the carrier concentration decreased with time.The film transformed from p-type to n-type semiconductor with resistivity of 85.58 W·cm,Hall mobility of 1.61 cm2 ·V-1 ·s-1 and carrier concentration of 4.53×10 1 6/cm3 after preservation for five months.The film transformed to p-type semiconductor again after thermal annealing under 10 -4 Pa.It can be deduced that,the p-type film reverts to n-type conductivity because hydrogen and water were adsorbed by film to create shal-low donors in air ambient.
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