Abstract:The carbon-rich hydrogenated amorphous silicon carbide (a-Si1-xCx:H) films were deposited by plasma enhanced chemical vapor deposition using silane (diluted to 10% in hydrogen) and ethylene as the gas sources. To observe surface enhanced Raman scattering (SERS), some samples were prepared on sputtered Ag films on Si substrates. A variety of techniques including ellipsometer, Fourier transform infrared spectroscopy, Raman scattering, scanning electron microscope, and photoluminescence (PL) spectroscopy were used to characterize the grown films. With enormous enhancement in Raman spectral intensity of carbon related phases and Si-C bonds, SERS is proved to be a powerful method to investigate carbon-rich a-Si1-xCx:H films. Multiphase structure of the grown a-Si1-xCx:H films is confirmed which possesses hydrogenated sp(3) Si-C network and sp(2) amorphous carbon clusters. Blue-green multiband PL are observed at room temperature. A possible PL mechanism is suggested: the PL originates from exciton-like and geminate recombination of excited electron-hole pairs through localized tail states within sp(2) clusters and gap states related to sp(3) Si-C network. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

The Fabrication of Nc-Si/Sio2 Multilayers and Blue-Light Emission

Blue light emission in nc-Si/SiO2 multilayers fabricated using layer by layer plasma oxidation

Light Emitting Devices Based on Nanocrystalline-Silicon Multilayer Structure

Photoluminescence from A-Si : H/Sio2 Multilayers Fabricated Using in Situ Layer by Layer Plasma Oxidation

The Structural and Optical Properties of nc-Si/SiO2 Multilayers

Strong Blue Photoluminescence from As-Fabricated Amorphous-Si:H∕sio2 Multilayers

The origin of blue photoluminescence from nc-Si/SiO 2 multilayers

Blue Emission from Hydrogen-Containing A-Si:H/sio2 Multilayers and the Investigation of Its Mechanism

Electrically Driven Luminescence of Nanocrystalline Si/SiO2 Multilayers on Various Substrates

Photoluminescence During the Crystallization of A-Si∶h/sio2 Multilayers

Step-by-Step Laser Crystallization of Amorphous Si:H/SiN X :H Multilayer for Active Layer in Microcavities

Blue-green luminescence and SERS study of carbon-rich hydrogenated amorphous silicon carbide films with multiphase structure

NcSi/SiO2 Multilayer Prepared by the Method of Laser Constrained Crystallization

The Evolution Investigation Of Photoluminescence From A-Si : H/Sio2 To Nc-Si/Sio2 Multilayers

Correlation Between Light Emissions from Amorphous-Si：H/SiO2 and Nc-Si/sio2 Multilayers

Enhanced Ultraviolet and Visible Photoluminescence of ZnO/Zn2SiO4/SiO2/Si Multilayer Structure

Fabrication and Luminescence Properties of Si Quantum Dots Based on Si-Rich Sinx/N-Rich Siny Multilayer

Enhanced Blue-Orange-Red Light Emission From Nc-Si:H/Sio2 Pillar Arrays Using Nanosphere Lithography

Pseudo nanocrystal silicon induced luminescence enhancement in a-Si /SiO2 multilayers

Pseudo Nanocrystal Silicon Induced Luminescence Enhancement in A-Si /sio 2 Multilayers

Characteristics of Luminescent Nc-Si/sio 2 Multilayers and the Influence of Annealing in Hydrogen